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3.1 MicroStructures or MicroSystems Technologies/ MicroElectroMechanicalSystems (MST/MEMS)
Micromachining techniques were developed over thirty years ago as a result of semiconductor technology. It was found that, through selective doping and etching, one could produce three-dimensional elements on a silicon wafer.
This technology became known worldwide as MST (MicroStructures or MicroSystems Technology). Somewhat more recently, companies in the United States adopted the term MEMS (MicroElectroMechanical Systems) as the descriptor of choice, whereas the rest of the world chose to stay with the original term MST. The difference in nomenclature has created substantial confusion in this emerging industry, and may actually have inhibited its growth.
Etymologically, the term MEMS places limitations on the technology and, therefore, MEMS should more rightly be considered a subset of MST rather than a broad-based descriptor. A true MEMS device must include both electrical and mechanical components which, consequently imply that there must be at least one moving or deformable part and that electricity must enter into its operation in some fashion.
