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3. MICROMILLING MACHINES
Size and quality of the micro-products depend on the properties of the used machine tools to manufacture them, including the overall accuracy and dynamic performance. Excellent capabilities of the machine tool are vital to such product requirements as size, accuracy, surface roughness and dimensional repeatability. In particular, machine bed, spindle, guides and driving systems result in key factors in the design of a micromilling machine.
Table 3.1 gives a rough approximation to the generic micromilling machine error sources.
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*This error is after CNC compensation. Tool expansion prior to compensation can be tenths of microns. |
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Table 3.1 Typical milling machine error sources. |
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Fig3.3 Commercial ultra precision machine tools: (a) Kern EVO [14]; (b) Kugler Microgantry GU [15]; (c) Fanuc ROBOnano [16].
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