Micromilling is one of the emerging fabrication technologies. It is characterized by mechanical interaction of a sharp tool with the workpiece material, causing breakage inside the material along defined paths, and eventually leading to removal of the useless part of the workpiece in the form of chips [2].

Even though it may not be capable of obtaining as small feature sizes as in lithographic processes, it is important in order to bridge the macro domain and the nano/micro domains for making functional components [3-4]. There exists a wide variety of important applications in the commercial and defense sectors (e.g. masks for deep X-ray lithography [5], asymmetric high precision moulds [6], etc.), which require high-strength materials and complex geometries that cannot be produced using current MEMS fabrication technologies. Micromilling has the potential to fill this void in MEMS technology by adding the capability of free form machining of complex 3D shapes from a wide variety and combination of traditional and well-understood engineering materials (alloys, composites, polymers, glasses and ceramics).

In view of this, the fabrication of micro and meso-scale devices has presented researchers with new and exciting challenges.

This chapter realises a global review of the micromilling technology. First, the origin of the micromilling technology is described. Second, the micromilling machine is studied paying special attention to the elements that differ from macro machines, such as the machine bed, spindle, guides, driving systems and control & monitoring systems. Third, most commonly used microtool types and their weaknesses are described. Fourth, workpiece materials are described. Fifth, currently existing micromilling application areas are mentioned and some samples are depicted. Sixth, major cutting process differences between macro and micro world are studied. Finally, future micromilling challenges are described.

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